Tag Archives: Microelectromechanical systems

Powerpoint Presentations on Advancement in MEMS Technology-1

SMART DUST:

Smartdust is a hypothetical system of many tiny microelectromechanical systems (MEMS) such as sensors, robots, or other devices, that can detect, for example, light, temperature, vibration, magnetism or chemicals; are usually networked wirelessly; and are distributed over some area to perform tasks, usually sensing.

POWERPOINT PRESENTATION ON SMART DUST

DOWNLOAD THE POWER POINT PRESENTATION ON SMARTDUST

 

COMPLETE LECTURE NOTES ON BASICS OF MICROELECTROMECHANICAL SYSTEMS(MEMS)

DOWNLOAD ALL THE MEMS LECTURE NOTES FROM THE LINKS GIVEN BELOW
THESE LECTURE NOTES CONTAIN COMPLETE INFORMATION ABOUT MEMS.

Introduction: history of MEMS, market for MEMS, overview of MEMS processes, properties of silicon, a sample MEMS process.
Handouts: class syllabus, silicon crystal origami, Petersen’s, Feynman’s.
Lecture Notes: Lecture 1.
Basics of Microtechnology: definitions and terminology, a sample process, lithography and etching.

References:There’s Plenty of Room at the Bottom” by Richard Feynman (reprinted in Journal of Microelectromechanical Systems, March 1992); “Silicon as a Mechanical Material” by Kurt Petersen (Proceedings of the IEEE, May 1982).
Lecture Notes: Lecture 2.

VIDEO LECTURE NOTES ON BIOMEMS & BIONANOTECHNOLOGY

An Introduction to BioMEMS and Bionanotechnology