Tag Archives: Microfluidic

Lecture Notes on MEMS Technology

microelectromechanical systems chip, sometimes...

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Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or Micro Systems TechnologyMST (in Europe).

Below are the lecture notes related to MEMS technology have a brief look at them.

Lecture 01 Introduction to MEMS.pdf

Lecture 02 Chemistry.pdf

Lecture 02 DIWater.pdf

Lecture 03 Clean Rooms.pdf

Lecture 03 Vacuum Systems.pdf