DOWNLOAD ALL THE MEMS LECTURE NOTES FROM THE LINKS GIVEN BELOW
THESE LECTURE NOTES CONTAIN COMPLETE INFORMATION ABOUT MEMS.
|Introduction: history of MEMS, market for MEMS, overview of MEMS processes, properties of silicon, a sample MEMS process.
Handouts: class syllabus, silicon crystal origami, Petersen’s, Feynman’s.
Lecture Notes: Lecture 1.
|Basics of Microtechnology: definitions and terminology, a sample process, lithography and etching.
References: “There’s Plenty of Room at the Bottom” by Richard Feynman (reprinted in Journal of Microelectromechanical Systems, March 1992); “Silicon as a Mechanical Material” by Kurt Petersen (Proceedings of the IEEE, May 1982).