Tag Archives: Semiconductor device fabrication

MICROELECTROMECHANICAL SYSTEMS (MEMS)

MEMS CHIPS

Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nano-scale into “Nanoelectromechanical” Systems (NEMS) and Nanotechnology.

MEMS are also referred to as micro machines, or Micro Systems Technology (MST). MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics.

MEMS DEVICES
(MEMS DEVICE)

MEMS generally range in size from a micrometer (a millionth of a meter) to a millimeter (thousandth of a meter). At these size scales, the standard constructs of classical physics do not always hold true. Due to MEMS’ large surface area to volume ratio, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass. Finite element analysis is an important part of MEMS design.