Lecture Notes on MEMS Technology

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Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or Micro Systems TechnologyMST (in Europe).

Below are the lecture notes related to MEMS technology have a brief look at them.

Lecture 01 Introduction to MEMS.pdf

Lecture 02 Chemistry.pdf

Lecture 02 DIWater.pdf

Lecture 03 Clean Rooms.pdf

Lecture 03 Vacuum Systems.pdf

Lecture 05 Ji Fang Mask Design..pdf

Lecture 06 Materials Science for MEMS.pdf

Lecture 07 CVD and Oxidation.pdf

Lecture 08 Dry Etching.pdf

Lecture 10 Wet Etching.pdf

Lecture 11 PVD.pdf

Lecture 12 Electrodeposition.pdf

Lecture 13 Other Micromachining Techniques.pdf

Lecture 15 LIGA.pdf

Lecture 15 Polymers for Microfabrication.pdf

Lecture 16a Bonding.pdf

Lecture 16b MEMS Packaging.pdf

Lecture 17a Microelectronics Integration with MEMS.pdf

Lecture 17b Packaging of Microfluidic and Optical.pdf

Lecture 18 MEMS CAD.pdf

Lecture 19 MEMS Metrology.pdf

Lecture 21 Optical MEMS.pdf

Lecture 22 Mechanical Microsystems.pdf
Lecture 23 Electrical and Magnetic Microsystems.pdf

Lecture 24 Chemical Microsystems.pdf

Lecture 25 Microfluidics.pdf

Lecture 26a BioMEMS.pdf

Lecture 26b BioMEMS.pdf

Lecture 26c BioMEMS.pdf

Lecture 26d BioMEMS.pdf

Lecture 27 Nanotechnology.pdf

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