Smartdust is a hypothetical system of many tiny microelectromechanical systems (MEMS) such as sensors, robots, or other devices, that can detect, for example, light, temperature, vibration, magnetism or chemicals; are usually networked wirelessly; and are distributed over some area to perform tasks, usually sensing.
POWERPOINT PRESENTATION ON SMART DUST–
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DOWNLOAD ALL THE MEMS LECTURE NOTES FROM THE LINKS GIVEN BELOW
THESE LECTURE NOTES CONTAIN COMPLETE INFORMATION ABOUT MEMS.
| Introduction: history of MEMS, market for MEMS, overview of MEMS processes, properties of silicon, a sample MEMS process. Handouts: class syllabus, silicon crystal origami, Petersen’s, Feynman’s. Lecture Notes: Lecture 1. |
| Basics of Microtechnology: definitions and terminology, a sample process, lithography and etching.
References: “There’s Plenty of Room at the Bottom” by Richard Feynman (reprinted in Journal of Microelectromechanical Systems, March 1992); “Silicon as a Mechanical Material” by Kurt Petersen (Proceedings of the IEEE, May 1982). |
An Introduction to BioMEMS and Bionanotechnology