SMART DUST:
Smartdust is a hypothetical system of many tiny microelectromechanical systems (MEMS) such as sensors, robots, or other devices, that can detect, for example, light, temperature, vibration, magnetism or chemicals; are usually networked wirelessly; and are distributed over some area to perform tasks, usually sensing.
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MEMS FOR HARSH ENVIRONMENTS
MEMS and NEMS sensor systems that can operate in the presence of high temperatures,
corrosive media, and/or high radiation hold great promise for harsh environment applications. They
would reduce weight, improve machine reliability and reduce cost in strategic market sectors such as
automotive, avionics, oil well logging, and nuclear power. This paper presents a review of the recent
advances in harsh-environment MEMS and NEMS sensors focusing on materials and devices. Special
emphasis is put on high-temperature operation. Wide-bandgap semiconductor materials for high
temperature applications are discussed from the device point of view. Micro-opto mechanical systems
(MOEMS) are presented as a new trend for high temperature applications. As an example of a harsh
environment MOEMS sensor, a vibration sensor is presented.
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- Lecture Notes on MEMS Technology (biomedikal.in)
