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Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or Micro Systems Technology – MST (in Europe).
Below are the lecture notes related to MEMS technology have a brief look at them.
Lecture 01 Introduction to MEMS.pdf
Lecture 05 Ji Fang Mask Design..pdf
Lecture 06 Materials Science for MEMS.pdf
Lecture 07 CVD and Oxidation.pdf
Lecture 12 Electrodeposition.pdf
Lecture 13 Other Micromachining Techniques.pdf
Lecture 15 Polymers for Microfabrication.pdf
Lecture 16b MEMS Packaging.pdf
Lecture 17a Microelectronics Integration with MEMS.pdf
Lecture 17b Packaging of Microfluidic and Optical.pdf
Lecture 22 Mechanical Microsystems.pdf
Lecture 23 Electrical and Magnetic Microsystems.pdf
Lecture 24 Chemical Microsystems.pdf
